Granted Patent
A New Class Of Non-chemically Amplified Molecular Photoresists For Next Generation Integrated Circuits (ICS) Technology
Application Number
201611044190
Patent Number
452719
Application Date
24-Dec-2016
Grant Date
19-Sep-2023
List of Inventors
Dr. Subrata Ghosh, Dr. Chullikkattil P. Pradeep, Dr. Kenneth E. Gonsalves, Dr. Satinder K. Sharma, Midathala Yogesh, Neha Thakur, Pulikanti Guruprasad Reddy, Santu Nandi.
Patent Documents
Patent Document
PDF Document
Representative Drawing
Patent Drawing