Granted Patent
Negative Tone Resist Compositions For Lithography
Application Number
202111050981
Patent Number
460129
Application Date
08-Nov-2021
Grant Date
18-Oct-2023
List of Inventors
Dr. Subrata Ghosh, Dr. Satinder K. Sharma, Dr. Kenneth E. Gonsalves, Santu Nandi, Lalit Khillare, Mohamad G. Moinuddin, Sunil Kumar, Manvendra Chauhan.
Patent Documents
Patent Document
PDF Document
Representative Drawing
Patent Drawing