Granted Patent
A Process For I-Line Resist Dissolution Modulation Using Hydroxy-Polymer
Application Number
202141007495
Patent Number
391608
Application Date
23-Feb-2021
Grant Date
09-Mar-2022
List of Inventors
Dr. Subrata Ghosh, Dr. Kenneth E Gonsalves, Santu Nandi, Lalit Killare, M Yogesh, Suman Dolai, Dr. Chullikkattil P Pradeep, Dr. Satinder Sharma, Anvesh Bogavelly, Deep Narayan Tiwari, Paritosh Jain, Surinder Singh.
Patent Documents
Patent Document
PDF Document
Representative Drawing
Patent Drawing