Granted Patent

Organic Clustures (MOCS) resist formulation Compatible to next Generation Lithogaphy applications for high volume elecrtronics chip manufacturing

Application Number

202311033883

Patent Number

524278

Application Date

15-May-2023

Grant Date

13-Mar-2024

List of Inventors

Dr. Kenneth E. Golsalves, Manvendra Chauhan, Sumit Chaudary, Kumar Patil Sharma, Diksha Thakur.

Patent Document

PDF Document

Representative Drawing

Patent Drawing